feature | ・easy maintenance using Repair parts kit ・wire up solenoid valve & position sensor to 15 pin D-sub connector ・speed controller& solenoid valve(2port + N2 port) are connected by stainless steel tube(φ6) ・NW25 angle valve mounted ・applications : pump isolation, high level of process by product in the gas stream |
Operation | Pneumatic |
Flange size | 4" ~ 8" |
Flange type | ISO、 JIS、 ASA、 CF |
Feedthrough | welded bellows |
Gate seal | FKM O-ring / etc |
Bonnet seal | FKM O-ring / etc |
Response time | ≤ 0.3 ~ 2sec |
Operating pressure range | 1x10-10 torr to 1.4 bar |
Differential pressure | |
Leak rate | ≺ 1x10-10 mbar l/sec |
Cycles until first service | 250,000 |
Temperature for Valve body | ≤ 200℃ |
Temperature for Actuator | ≤ 80℃ |
Bake temperature | ≤ 150℃ |
Material | SUS304、 AL6061 anodizing |
Mounting position | Any |
Operating pressure (N2) | 4~7kgf/cm2 |