Feature | ・low particle by ceramic ball mechanism ・easy maintenance using Repair part kit ・applications : pump isolation |
Operation | Manual / Pneumatic |
Flange size | 1.5" ~ 14" |
Flange type | ISO、 JIS、 ASA、 CF |
Feedthrough | welded bellows |
Gate seal | FKM O-ring / Kalrez O-ring / etc |
Bonnet seal | FKM O-ring / etc |
Response time | ≤ 2sec |
Operating pressure range | 1x10-10 torr to 1.4 bar |
Differential pressure | 1.5" ~ 14" : ≤ 1.4 bar 16" ~ 22" : ≤ 1 bar |
Leak rate | ≺ 1x10-10 torr l/sec |
Cycles until first service | 250,000 |
Temperature for Valve body | ≤ 200℃ |
Temperature for Actuator | ≤ 80℃ |
Bake temperature | ≤ 150℃ |
Material | SUS304、 AL6061 anodizing |
Mounting position | Any |
Operating pressure (N2) | 4~7kgf/cm2 |